 Blazed diffraction grating Pitch: 24μm Height: 1μm |
 Diffraction grating |
 Fresnel min. Pitch: 2μm Height: 1μm |
 Chirp min. Pitch: 2μm Height: 1μm |
 Micro Well Array Configuration: 0.2 x 0.2 x 0.05μm Number of wells: 4,000 |
 Micro Lens Array |
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